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N-CIM
N-SECS
N-WMS
N-POP
N-MES
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LCD
±¸¹Ì LG Philips LCD
P2
Wet-Etch, BCL, ½Ä°¢Lifter, CleanLifter, Oven Transfer
P3
Wet-Etch, µÎ²² ÃøÁ¤±â, Dry Asher, Oven, Wet-Strip,
P3
°Ë»ç±â, CleanLifter, HP-CP, Loader,
P4
Initial Cleaner,ÀÌÀç±â, Loader
P5
Loader
P6
Sputter, ÀÌÀç±â, Loader
CF145
´ë¸¸ CPT
G4,5
Wet-Etch, Wet-Strip
G6
Wet-Etch, Wet-Strip
´ë¸¸ AUO
G5
Initial Cleaner
G7(L7A)
Initial Cleaner, PreDepo Cleaner
G7.5(L7B)
Initial Cleaner, Wet-Strip
G8(L8A)
Initial Cleaner, PreDepo Cleaner
´ë¸¸ CMO
G7.5
Wet-Etch
´ë¸¸ Innolux
G5
Wet-Strip
G6
Wet-Etch, RobotÁ¦¾îPC, G-Mura Data PC, Rubbing Data PC
Áß±¹ õ¸¶
G4.5
Wet-Etch
Áß±¹ IVO
G5
Wet-Etch, Wet-Strip, PreDepo Cleaner
Áß±¹ Truly
G2
Wet-Strip
Áß±¹ Century
G4.5
Wet-Strip, , PreDepo Cleaner
Áß±¹ BOE-CD
G4.5
Unpacker, Packer, ITO
ÅÁÁ¤ »ï¼ºÀüÀÚ
T7-2
Visual Inspection Convayor
OLED
õ¾È »ï¼º SDI
Plasma ¼¼Á¤±â, Wet-Etch, Mask ¼¼Á¤±â,
PreDepo Cleaner
,
Mask ÀÔ°í°Ë»ç±â
,
Mask ÃøÁ¤±â, InLine Cleaner
¹ÝµµÃ¼
±¸¹Ì LG Siltron
200mm
VIS, FCS, Slight Etcher, EPI Cleaner
»ï¼º
±âÈï ¹ÝµµÃ¼
(R-Line)
300mm
Wet Station(Mask ¼¼Á¤±â), PR Coater Inline
»ï¼º ȼº ¹ÝµµÃ¼
(NRD-Line)
300mm
Wet Station(Mask ¼¼Á¤±â)
SENSOR
U-ITC
Evaporator
ÇöÀå
Àåºñ¸í
LCD
Áß±¹ BOE-Hydis
PI, Assy, Rubbing InLine(3Á¾ 6set)
Áß±¹ Truly
G2 1Â÷
Coater & Develop InLIne(2Á¾ 9set)
G2 2Â÷
Etch & Strip InLine(6set)
±¸¹Ì LG Philips LCD
P4
Roll Print InLine
¹ÝµµÃ¼
»ï¼º ±âÈï ¹ÝµµÃ¼
PR Coater InLine
ÇöÀå
Àåºñ¸í
LCD
±¸¹Ì LG Philips LCD
P2
Wet-Etch, BCL, ½Ä°¢Lifter, CleanLifter, Oven Transfer
P3
Wet-Etch, µÎ²² ÃøÁ¤±â, Dry Asher, Oven, Wet-Strip,
P3
°Ë»ç±â, CleanLifter, HP-CP, Loader,
P4
Initial Cleaner,ÀÌÀç±â, Loader
P5
Loader
P6
Sputter, ÀÌÀç±â, Loader
CF145
´ë¸¸ CPT
G4,5
Wet-Etch, Wet-Strip
G6
Wet-Etch, Wet-Strip
´ë¸¸ AUO
G5
Initial Cleaner
G7(L7A)
Initial Cleaner, PreDepo Cleaner
G7.5(L7B)
Initial Cleaner, Wet-Strip
G8(L8A)
Initial Cleaner, PreDepo Cleaner
´ë¸¸ CMO
G7.5
Wet-Etch
´ë¸¸ Innolux
G5
Wet-Strip
G6
Wet-Etch, RobotÁ¦¾îPC, G-Mura Data PC, Rubbing Data PC
Áß±¹ õ¸¶
G4.5
Wet-Etch
Áß±¹ IVO
G5
Wet-Etch, Wet-Strip, PreDepo Cleaner
Áß±¹ Truly
G2
Wet-Strip
Áß±¹ Century
G4.5
Wet-Strip, , PreDepo Cleaner
Áß±¹ BOE-CD
G4.5
Unpacker, Packer, ITO
ÅÁÁ¤ »ï¼ºÀüÀÚ
T7-2
Visual Inspection Convayor
OLED
õ¾È »ï¼º SDI
Plasma ¼¼Á¤±â, Wet-Etch, Mask ¼¼Á¤±â,
PreDepo Cleaner
,
Mask ÀÔ°í°Ë»ç±â
,
Mask ÃøÁ¤±â, InLine Cleaner
¹ÝµµÃ¼
±¸¹Ì LG Siltron
200mm
VIS, FCS, Slight Etcher, EPI Cleaner
»ï¼º
±âÈï ¹ÝµµÃ¼
(R-Line)
300mm
Wet Station(Mask ¼¼Á¤±â), PR Coater Inline
»ï¼º ȼº ¹ÝµµÃ¼
(NRD-Line)
300mm
Wet Station(Mask ¼¼Á¤±â)
SENSOR
U-ITC
Evaporator
ÇöÀå
Àåºñ¸í
LCD
Áß±¹ BOE-Hydis
PI, Assy, Rubbing InLine(3Á¾ 6set)
Áß±¹ Truly
G2 1Â÷
Coater & Develop InLIne(2Á¾ 9set)
G2 2Â÷
Etch & Strip InLine(6set)
±¸¹Ì LG Philips LCD
P4
Roll Print InLine
¹ÝµµÃ¼
»ï¼º ±âÈï ¹ÝµµÃ¼
PR Coater InLine